EP1704585
METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY
:
EP einkaleyfi: Þýðing ekki lögð inn:
20.12.2004:
15.3.2017:
04821787.1
:
19.12.2024
:
METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY
20.12.2004
15.3.2017
:
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL:
308 Bynum Hall, Campus Box 4105, 27599-4105, Chapel Hill, NC, US
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DESIMONE, Joseph, M.:
Chapel Hill, NC, US
:
ROLLAND, Jason, P.:
Durham, NC, US
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EXNER, Ansley, E.:
Augusta, Georgia, US
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SAMULSKI, Edward, T.:
Chapel Hill, NC, US
:
SAMULSKI, R., Jude:
Chapel Hill, NC, US
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MAYNOR, Benjamin, W.:
Durham, NC, US
:
EULISS, Larken, E.:
Chapel Hill, NC, US
:
DENISON, Ginger, M.:
Durham, NC, US
:
531531 P:
19.12.2003:
US
:
583170 P:
25.6.2004:
US
:
604970 P:
27.8.2004:
US
:
US2004042706:
20.12.2004
:
H01L 21/302, G03F 7/00, A61K 9/51