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EP1704585

METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY

  • Status:
    EP einkaleyfi: Þýðing ekki lögð inn
  • EP appl. date:
    20.12.2004
  • EP published:
    15.3.2017
  • EP application number:
    04821787.1
  • Max expiry date:
    19.12.2024
  • Title:
    METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY

Timeline

Today
20.12.2004EP application
15.3.2017EP Publication

Owner

  • Name:
    THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
  • Address:
    308 Bynum Hall, Campus Box 4105, 27599-4105, Chapel Hill, NC, US

Inventor

  • Name:
    DESIMONE, Joseph, M.
  • Address:
    Chapel Hill, NC, US
  • Name:
    ROLLAND, Jason, P.
  • Address:
    Durham, NC, US
  • Name:
    EXNER, Ansley, E.
  • Address:
    Augusta, Georgia, US
  • Name:
    SAMULSKI, Edward, T.
  • Address:
    Chapel Hill, NC, US
  • Name:
    SAMULSKI, R., Jude
  • Address:
    Chapel Hill, NC, US
  • Name:
    MAYNOR, Benjamin, W.
  • Address:
    Durham, NC, US
  • Name:
    EULISS, Larken, E.
  • Address:
    Chapel Hill, NC, US
  • Name:
    DENISON, Ginger, M.
  • Address:
    Durham, NC, US

Priority

  • Number:
    531531 P
  • Date:
    19.12.2003
  • Country:
    US
  • Number:
    583170 P
  • Date:
    25.6.2004
  • Country:
    US
  • Number:
    604970 P
  • Date:
    27.8.2004
  • Country:
    US

Classification

  • Categories:
    H01L 21/302, G03F 7/00, A61K 9/51

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