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EP1713113

STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD

  • Status:
    EP einkaleyfi: Þýðing ekki lögð inn
  • EP appl. date:
    27.1.2005
  • EP published:
    29.12.2010
  • EP application number:
    05704182.4
  • Max expiry date:
    26.1.2025
  • Title:
    STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD

Timeline

Today
27.1.2005EP application
29.12.2010EP Publication

Owner

  • Name:
    NIKON CORPORATION
  • Address:
    12-1, Yurakucho 1-chome, 100-8331, Chiyoda-kuTokyo, JP

Inventor

  • Name:
    SHIBAZAKI, Yuichi
  • Address:
    Chiyoda-ku,Tokyo, JP

Priority

  • Number:
    2004025837
  • Date:
    2.2.2004
  • Country:
    JP
  • Number:
    2004300566
  • Date:
    14.10.2004
  • Country:
    JP

Classification

  • Categories:
    H01L 21/027, G03F 7/20

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