EP2195834
SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS
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EP einkaleyfi: Þýðing ekki lögð inn:
22.9.2008:
24.6.2020:
08831947.0
:
21.9.2028
:
SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS
22.9.2008
24.6.2020
:
KLA-Tencor Corporation:
One Technology Drive, Milpitas, CA 95035, US
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BHASKAR, Kris:
San Jose, CA 95120, US
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BHASKAR, Chetana:
San Jose, CA 95120, US
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KULKARNI, Ashok:
San Jose, CA 95120, US
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ROSENGAUS, Eliezer:
Palo Alto, CA 94303, US
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CAMPOCHIARO, Cecelia:
Sunnyvale, CA 94087, US
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MAHER, Chris:
Campbell, CA 95008, US
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DUFFY, Brian:
San Jose, CA 95120, US
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KHULLAR, Aneesh:
Sunnyvale, CA 94089, US
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KOHLI, Alpa:
Saratoga, CA 95070, US
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BALASUBRAMANIAN, Lalita:
Fremont, CA 94555, US
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BHATTACHARYYA, Santosh:
San Jose, CA 95123, US
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MAHADEVAN, Mohan:
Livermore, CA 94550, US
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974030 P:
20.9.2007:
US
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234201:
19.9.2008:
US
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US2008077203:
22.9.2008
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H01L 21/66, G06T 1/20, G06T 7/00