EP2195834
SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
22.9.2008EP published:
24.6.2020EP application number:
08831947.0
EPO information:
European Patent Register
Max expiry date:
21.9.2028
Title:
SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS
Timeline
Today
22.9.2008EP application
24.6.2020EP Publication
Owner
Name:
KLA-Tencor CorporationAddress:
One Technology Drive, Milpitas, CA 95035, US
Inventor
Name:
BHASKAR, KrisAddress:
San Jose, CA 95120, US
Name:
BHASKAR, ChetanaAddress:
San Jose, CA 95120, US
Name:
KULKARNI, AshokAddress:
San Jose, CA 95120, US
Name:
ROSENGAUS, EliezerAddress:
Palo Alto, CA 94303, US
Name:
CAMPOCHIARO, CeceliaAddress:
Sunnyvale, CA 94087, US
Name:
MAHER, ChrisAddress:
Campbell, CA 95008, US
Name:
DUFFY, BrianAddress:
San Jose, CA 95120, US
Name:
KHULLAR, AneeshAddress:
Sunnyvale, CA 94089, US
Name:
KOHLI, AlpaAddress:
Saratoga, CA 95070, US
Name:
BALASUBRAMANIAN, LalitaAddress:
Fremont, CA 94555, US
Name:
BHATTACHARYYA, SantoshAddress:
San Jose, CA 95123, US
Name:
MAHADEVAN, MohanAddress:
Livermore, CA 94550, US
Priority
Number:
974030 PDate:
20.9.2007Country:
US
Number:
234201Date:
19.9.2008Country:
US
Classification
Categories:
H01L 21/66, G06T 1/20, G06T 7/00