EP2282188
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
12.5.2009EP published:
12.8.2015EP application number:
09754556.0
EPO information:
European Patent Register
Max expiry date:
11.5.2029
Title:
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS
Timeline
Today
12.5.2009EP application
12.8.2015EP Publication
Owner
Name:
Nikon CorporationAddress:
15-3, Konan 2-chome Minato-ku, 108-6290, Tokyo, JP
Inventor
Name:
TANITSU OsamuAddress:
Tokyo, JP
Name:
TANAKA HirohisaAddress:
Tokyo, JP
Priority
Number:
2008138841Date:
28.5.2008Country:
JP
Classification
Categories:
G01M 11/00, G03F 7/20, H01L 21/027