EP2428541

Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films

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    EP einkaleyfi: Þýðing ekki lögð inn
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    5.9.2011
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    6.3.2019
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    11179985.4
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    4.9.2031
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    Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films

5.9.2011
6.3.2019
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    BASF SE
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    Carl-Bosch-Strasse 38, 67056, Ludwigshafen am Rhein, DE
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    Li, Yuzhuo
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    Heidelberg, DE
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    Chu, Jea-Ju
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    Shilin District, Taipei City, TW
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    Venkataraman, Shyam Sundar
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    Zhongli CityTaoyuan County, TW
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    Chiu, Wei Lan William
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    Taipei City, TW
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    Pinder, Harvey Wayne
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    Chicago, IL, US
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    380719 P
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    8.9.2010
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    US
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    C09K 3/14, C09G 1/02, H01L 21/3105, C09K 13/00