EP2428541
Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
5.9.2011EP published:
6.3.2019EP application number:
11179985.4
EPO information:
European Patent Register
Max expiry date:
4.9.2031
Title:
Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
Timeline
Today
5.9.2011EP application
6.3.2019EP Publication
Owner
Name:
BASF SEAddress:
Carl-Bosch-Strasse 38, 67056, Ludwigshafen am Rhein, DE
Inventor
Name:
Li, YuzhuoAddress:
Heidelberg, DE
Name:
Chu, Jea-JuAddress:
Shilin District, Taipei City, TW
Name:
Venkataraman, Shyam SundarAddress:
Zhongli CityTaoyuan County, TW
Name:
Chiu, Wei Lan WilliamAddress:
Taipei City, TW
Name:
Pinder, Harvey WayneAddress:
Chicago, IL, US
Priority
Number:
380719 PDate:
8.9.2010Country:
US
Classification
Categories:
C09K 3/14, C09G 1/02, H01L 21/3105, C09K 13/00