EP2608872

METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY

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    EP einkaleyfi: Þýðing ekki lögð inn
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    23.8.2011
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    31.7.2019
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    11820497.3
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    22.8.2031
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    METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY

23.8.2011
31.7.2019
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    Exogenesis Corporation
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    20 Fortune Drive, 01821, Billerica, Massachusetts, US
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    KIRKPATRICK, Sean, R.
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    BillericaMassachusetts, US
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    KIRKPATRICK, Allen, R.
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    BillericaMassachusetts, US
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    201161490675 P
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    27.5.2011
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    US
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    201161484421 P
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    10.5.2011
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    US
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    201161473359 P
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    8.4.2011
  • :
    US
  • :
    37622510 P
  • :
    23.8.2010
  • :
    US
  • :
    US2011048754
  • :
    23.8.2011
  • :
    H01J 37/05, H01J 37/317, H05H 3/00, H01L 21/02, H01L 21/265, H01L 21/311