EP2608872
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
23.8.2011EP published:
31.7.2019EP application number:
11820497.3
EPO information:
European Patent Register
Max expiry date:
22.8.2031
Title:
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
Timeline
Today
23.8.2011EP application
31.7.2019EP Publication
Owner
Name:
Exogenesis CorporationAddress:
20 Fortune Drive, 01821, Billerica, Massachusetts, US
Inventor
Name:
KIRKPATRICK, Sean, R.Address:
BillericaMassachusetts, US
Name:
KIRKPATRICK, Allen, R.Address:
BillericaMassachusetts, US
Priority
Number:
201161490675 PDate:
27.5.2011Country:
US
Number:
201161484421 PDate:
10.5.2011Country:
US
Number:
201161473359 PDate:
8.4.2011Country:
US
Number:
37622510 PDate:
23.8.2010Country:
US
Classification
Categories:
H01J 37/05, H01J 37/317, H05H 3/00, H01L 21/02, H01L 21/265, H01L 21/311