EP2609102
MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
25.8.2011EP published:
31.12.2014EP application number:
11752057.7
EPO information:
European Patent Register
Max expiry date:
24.8.2031
Title:
MOLYBDENUM (IV) AMIDE PRECURSORS AND USE THEREOF IN ATOMIC LAYER DEPOSITION
Timeline
Today
25.8.2011EP application
31.12.2014EP Publication
Owner
Name:
Sigma-Aldrich Co. LLCAddress:
3050 Spruce Street, 63103, St. Louis, MO, US
Inventor
Name:
HEYS, Peter, NicholasAddress:
CreweCheshire CW2 6QE, GB
Name:
ODEDRA, RajeshAddress:
AltrinchamCheshire WA14 5NU, GB
Name:
HINDLEY, Sarah, LouiseAddress:
ClubmoorLiverpool L13 9BT, GB
Priority
Number:
377692 PDate:
27.8.2010Country:
US
Classification
Categories:
C07F 11/00, C07F 17/00, C23C 16/40, C23C 16/455, B05D 1/00