EP2614121
AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
6.9.2011EP published:
6.3.2019EP application number:
11823139.8
EPO information:
European Patent Register
Max expiry date:
5.9.2031
Title:
AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES
Timeline
Today
6.9.2011EP application
6.3.2019EP Publication
Owner
Name:
BASF SEAddress:
Carl-Bosch-Strasse 38, 67056, Ludwigshafen am Rhein, DE
Inventor
Name:
LI, YuzhuoAddress:
Heidelberg, DE
Name:
CHU, Jea-JuAddress:
Taipei City, TW
Name:
VENKATARAMAN, Shyam SundarAddress:
Zhongli CityTaoyuan County, TW
Name:
USMAN IBRAHIM, Sheik AnsarAddress:
PotsdamNY, US
Name:
PINDER, Harvey WayneAddress:
ChicagoIL, US
Priority
Number:
380721 PDate:
8.9.2010Country:
US
Classification
Categories:
C09G 1/02, C09G 1/04, C09G 1/18, C09K 3/14, C08L 33/24, H01L 21/3105