EP2624284
Low energy ion beam etch
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
30.1.2013EP published:
25.5.2016EP application number:
13153160.0
EPO information:
European Patent Register
Max expiry date:
29.1.2033
Title:
Low energy ion beam etch
Timeline
Today
30.1.2013EP application
25.5.2016EP Publication
Owner
Name:
FEI CompanyAddress:
5350 NE Dawson Creek Drive, 97124-5793, Hillsboro, OR, US
Inventor
Name:
Rue, Mr. ChadAddress:
Portland, OR, US
Priority
Number:
201261593281 PDate:
31.1.2012Country:
US
Number:
201213717272Date:
17.12.2012Country:
US
Classification
Categories:
H01L 21/311