EP2669931
DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
27.1.2012EP published:
15.4.2020EP application number:
12739189.4
EPO information:
European Patent Register
Max expiry date:
26.1.2032
Title:
DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD
Timeline
Today
27.1.2012EP application
15.4.2020EP Publication
Owner
Name:
The University of TokyoAddress:
3-1, Hongo 7-chome, Bunkyo-ku, Tokyo 113-8654, JP
Name:
Nikon CorporationAddress:
15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, JP
Inventor
Name:
FUJIMOTO, HiroshiAddress:
Tokyo 113-8654, JP
Name:
SAIKI, KazuakiAddress:
Tokyo 100-8331, JP
Name:
SAKATA, KoichiAddress:
Tokyo 100-8331, JP
Priority
Number:
2011017265Date:
28.1.2011Country:
JP
Classification
Categories:
G03F 7/20