EP2878699
TANTALUM SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
6.12.2013EP published:
15.7.2020EP application number:
13866236.6
EPO information:
European Patent Register
Max expiry date:
5.12.2033
Title:
TANTALUM SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
Timeline
Today
6.12.2013EP application
15.7.2020EP Publication
Owner
Name:
JX Nippon Mining & Metals Corp.Address:
6-3, Otemachi 2-chome, Chiyoda-ku Tokyo 100-8164, JP
Inventor
Name:
SENDA, ShinichiroAddress:
Kitaibaraki-shi Ibaraki 319-1535, JP
Name:
NAGATSU, KotaroAddress:
Kitaibaraki-shi Ibaraki 319-1535, JP
Priority
Number:
2012276883Date:
19.12.2012Country:
JP
Classification
Categories:
C23C 14/34, C23C 14/14, H01L 21/285, B21B 1/22