EP2881790
Photomask blank
- :EP einkaleyfi: Þýðing ekki lögð inn
- :3.12.2014
- :19.6.2019
- :14196008.8
- :2.12.2034
- :Photomask blank
3.12.2014
19.6.2019
- :Shin-Etsu Chemical Co., Ltd.
- :6-1, Ohtemachi 2-chome Chiyoda-ku, Tokyo, JP
- :Sasamoto, Kouhei
- :Joetsu-shi, Niigata, JP
- :Inazuki, Yukio
- :Joetsu-shi, Niigata, JP
- :Fukaya, Souichi
- :Joetsu-shi, Niigata, JP
- :Nakagawa, Hideo
- :Joetsu-shi, Niigata, JP
- :Kaneko, Hideo
- :Joetsu-shi, Niigata, JP
- :2013253239
- :6.12.2013
- :JP
- :G03F 1/00, G03F 1/26, G03F 1/30, G03F 1/54, G03F 1/46