EP2881790

Photomask blank

  • Status:
    EP einkaleyfi: Þýðing ekki lögð inn
  • EP appl. date:
    3.12.2014
  • EP published:
    19.6.2019
  • EP application number:
    14196008.8
  • Max expiry date:
    2.12.2034
  • Title:
    Photomask blank

Timeline

Today
3.12.2014EP application
19.6.2019EP Publication

Owner

  • Name:
    Shin-Etsu Chemical Co., Ltd.
  • Address:
    6-1, Ohtemachi 2-chome Chiyoda-ku, Tokyo, JP

Inventor

  • Name:
    Sasamoto, Kouhei
  • Address:
    Joetsu-shi, Niigata, JP
  • Name:
    Inazuki, Yukio
  • Address:
    Joetsu-shi, Niigata, JP
  • Name:
    Fukaya, Souichi
  • Address:
    Joetsu-shi, Niigata, JP
  • Name:
    Nakagawa, Hideo
  • Address:
    Joetsu-shi, Niigata, JP
  • Name:
    Kaneko, Hideo
  • Address:
    Joetsu-shi, Niigata, JP

Priority

  • Number:
    2013253239
  • Date:
    6.12.2013
  • Country:
    JP

Classification

  • Categories:
    G03F 1/00, G03F 1/26, G03F 1/30, G03F 1/54, G03F 1/46

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