EP2881790
Photomask blank
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
3.12.2014EP published:
19.6.2019EP application number:
14196008.8
EPO information:
European Patent Register
Max expiry date:
2.12.2034
Title:
Photomask blank
Timeline
Today
3.12.2014EP application
19.6.2019EP Publication
Owner
Name:
Shin-Etsu Chemical Co., Ltd.Address:
6-1, Ohtemachi 2-chome Chiyoda-ku, Tokyo, JP
Inventor
Name:
Sasamoto, KouheiAddress:
Joetsu-shi, Niigata, JP
Name:
Inazuki, YukioAddress:
Joetsu-shi, Niigata, JP
Name:
Fukaya, SouichiAddress:
Joetsu-shi, Niigata, JP
Name:
Nakagawa, HideoAddress:
Joetsu-shi, Niigata, JP
Name:
Kaneko, HideoAddress:
Joetsu-shi, Niigata, JP
Priority
Number:
2013253239Date:
6.12.2013Country:
JP
Classification
Categories:
G03F 1/00, G03F 1/26, G03F 1/30, G03F 1/54, G03F 1/46