EP2927749
CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
17.10.2013EP published:
11.12.2019EP application number:
13851077.1
EPO information:
European Patent Register
Max expiry date:
16.10.2033
Title:
CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
Timeline
Today
17.10.2013EP application
11.12.2019EP Publication
Owner
Name:
FUJIFILM CorporationAddress:
26-30, Nishiazabu 2-chome Minato-ku, Tokyo 106-8620, JP
Inventor
Name:
YAMANAKA, TsukasaAddress:
Haibara-gun, Shizuoka 421-0396, JP
Name:
KAWAMOTO, TakashiAddress:
Haibara-gun, Shizuoka 421-0396, JP
Priority
Number:
2012240752Date:
31.10.2012Country:
JP
Number:
2013031277Date:
20.2.2013Country:
JP
Classification
Categories:
G03F 7/30, G03F 7/32, G03F 7/038, G03F 7/039, B65D 81/24, H01L 21/027