EP2973676
GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
11.3.2014EP published:
28.11.2018EP application number:
14779907.6
EPO information:
European Patent Register
Max expiry date:
10.3.2034
Title:
GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE
Timeline
Today
11.3.2014EP application
28.11.2018EP Publication
Owner
Name:
Kateeva, Inc.Address:
7015 Gateway Boulevard, 94560, Newark, CA, US
Inventor
Name:
MAUCK, JustinAddress:
Menlo Park, California, US
Name:
KO, Alexander Sou-KangAddress:
Menlo Park, California, US
Name:
VRONSKY, EliyahuAddress:
Menlo Park, California, US
Name:
ALDERSON, ShandonAddress:
Menlo Park, California, US
Priority
Number:
201313802304Date:
13.3.2013Country:
US
Classification
Categories:
H01L 21/677, H01L 51/56, B41J 29/13, B41J 29/02