EP3033440
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
14.8.2014EP published:
21.4.2021EP application number:
14835827.8
EPO information:
European Patent Register
Max expiry date:
13.8.2034
Title:
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
Timeline
Today
14.8.2014EP application
21.4.2021EP Publication
Owner
Name:
Applied Materials, Inc.Address:
3050 Bowers Avenue, Santa Clara, California 95054, US
Inventor
Name:
WEST, Brian T.Address:
San Jose, California 95130, US
Name:
COX, Michael S.Address:
Gilroy, California 95020, US
Name:
OH, JeonghoonAddress:
Saratoga, California 95070, US
Priority
Number:
201361866006 PDate:
14.8.2013Country:
US
Classification
Categories:
C23C 14/34, H01J 37/34