EP3033764
METHODS AND APPARATUS FOR DETERMINING FOCUS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
8.8.2014EP published:
6.10.2021EP application number:
14836059.7
EPO information:
European Patent Register
Max expiry date:
7.8.2034
Title:
METHODS AND APPARATUS FOR DETERMINING FOCUS
Timeline
Today
8.8.2014EP application
6.10.2021EP Publication
Owner
Name:
KLA - Tencor CorporationAddress:
One Technology Drive, Milpitas, California 95035, US
Inventor
Name:
PANDEV, Stillian IvanovAddress:
Santa Clara, California 95050, US
Priority
Number:
201361864527 PDate:
10.8.2013Country:
US
Number:
201414451320Date:
4.8.2014Country:
US
Classification
Categories:
H01L 21/027, G03F 7/20