EP3039484
STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
20.8.2014EP published:
18.7.2018EP application number:
14752886.3
EPO information:
European Patent Register
Max expiry date:
19.8.2034
Title:
STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
Timeline
Today
20.8.2014EP application
18.7.2018EP Publication
Owner
Name:
AZ Electronic Materials (Luxembourg) S.à.r.l.Address:
46 Place Guillaume ll, 1648, Luxembourg, LU
Inventor
Name:
YAO, HuirongAddress:
Plainsboro, New Jersey, US
Name:
MULLEN, Salem K.Address:
Florham Park, New Jersey, US
Name:
WOLFER, ElizabethAddress:
Bethlehem, Pennsylvania, US
Name:
MCKENZIE, DouglasAddress:
Easton, Pennsylvania, US
Name:
CHO, JoonYeonAddress:
Bridgewater, New Jersey, US
Name:
PADMANABAN, MunirathnaAddress:
Bridgewater, New Jersey, US
Priority
Number:
201314015222Date:
30.8.2013Country:
US
Classification
Categories:
G03F 7/09, H01L 21/027, C08G 77/58, C08G 79/00