EP3055076
IMPROVED WAYS TO GENERATE PLASMA IN CONTINUOUS POWER MODE FOR LOW PRESSURE PLASMA PROCESSES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
7.10.2014EP published:
7.6.2023EP application number:
14781871.0
EPO information:
European Patent Register
Max expiry date:
6.10.2034
Title in English:
IMPROVED WAYS TO GENERATE PLASMA IN CONTINUOUS POWER MODE FOR LOW PRESSURE PLASMA PROCESSESLanguage of the patent:
English
Timeline
Today
7.10.2014EP application
7.6.2023EP Publication
Owner
Name:
Europlasma nvAddress:
Industriepark De Bruwaan 5D, 9700 Oudenaarde, BE
Inventor
Name:
LEGEIN, FilipAddress:
B-9700 Oudenaarde, BE
Name:
ROGGE, EvaAddress:
B-9700 Oudenaarde, BE
Name:
SERCU, MarcAddress:
B-9700 Oudenaarde, BE
Priority
Number:
13187623Date:
7.10.2013Country:
EP
Classification
Categories:
H01J 37/32, C23C 16/50, B05D 1/00