EP3060642
CLEANING FORMULATIONS FOR REMOVING RESIDUES ON SURFACES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
15.9.2014EP published:
6.11.2019EP application number:
14855311.8
EPO information:
European Patent Register
Max expiry date:
14.9.2034
Title:
CLEANING FORMULATIONS FOR REMOVING RESIDUES ON SURFACES
Timeline
Today
15.9.2014EP application
6.11.2019EP Publication
Owner
Name:
FujiFilm Electronic Materials USA, Inc.Address:
80 Circuit Drive, 02852, North Kingstown, RI, US
Inventor
Name:
DORY, ThomasAddress:
Gilbert, AZ, US
Name:
DU, BingAddress:
Gilbert, AZ, US
Name:
TAKAHASHI, TomonoriAddress:
Mesa, AZ, US
Name:
KNEER, Emil A.Address:
Mesa, Arizona, US
Priority
Number:
201361893424 PDate:
21.10.2013Country:
US
Classification
Categories:
H01L 21/311, C11D 3/00, C11D 7/32, C11D 7/50, C11D 11/00, G03F 7/42