EP3064483
HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
:
EP einkaleyfi: Þýðing ekki lögð inn:
28.10.2014:
1.5.2019:
14858176.2
:
27.10.2034
:
HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
28.10.2014
1.5.2019
:
Zeon Corporation:
6-2, Marunouchi 1-chome, 100-8246, Chiyoda-kuTokyo, JP
:
SUGIMOTO, Tatsuya:
Tokyo, JP
:
2013225480:
30.10.2013:
JP
:
JP2014078553:
28.10.2014
:
C07C 19/08, H01J 37/32