EP3064483
HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
28.10.2014EP published:
1.5.2019EP application number:
14858176.2
EPO information:
European Patent Register
Max expiry date:
27.10.2034
Title:
HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
Timeline
Today
28.10.2014EP application
1.5.2019EP Publication
Owner
Name:
Zeon CorporationAddress:
6-2, Marunouchi 1-chome, 100-8246, Chiyoda-kuTokyo, JP
Inventor
Name:
SUGIMOTO, TatsuyaAddress:
Tokyo, JP
Priority
Number:
2013225480Date:
30.10.2013Country:
JP
Classification
Categories:
C07C 19/08, H01J 37/32