EP3077129
CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
3.12.2014EP published:
11.11.2020EP application number:
14867771.9
EPO information:
European Patent Register
Max expiry date:
2.12.2034
Title:
CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES
Timeline
Today
3.12.2014EP application
11.11.2020EP Publication
Owner
Name:
FujiFilm Electronic Materials USA, Inc.Address:
80 Circuit Drive, North Kingstown, RI 02852, US
Inventor
Name:
TAKAHASHI, TomonoriAddress:
Mesa, AZ 85206, US
Name:
DU, BingAddress:
Gilbert, AZ 85295, US
Name:
WOJTCZAK, William A.Address:
Austin, TX 78737, US
Name:
DORY, ThomasAddress:
Gilbert, Arizona 85233, US
Name:
KNEER, Emil A.Address:
Mesa, Arizona 85212, US
Priority
Number:
201361912697 PDate:
6.12.2013Country:
US
Number:
201461936999 PDate:
7.2.2014Country:
US
Classification
Categories:
H01L 21/311, H01L 21/02, C11D 3/00, C11D 7/32, C11D 7/50, C11D 11/00