EP3078088
AMPLIFIER ARRANGEMENT AND DRIVER LASER ARRANGEMENT FOR AN EUV LIGHT SOURCE COMPRISING SAME
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
5.12.2013EP published:
3.2.2021EP application number:
13805818.5
EPO information:
European Patent Register
Max expiry date:
4.12.2033
Title:
AMPLIFIER ARRANGEMENT AND DRIVER LASER ARRANGEMENT FOR AN EUV LIGHT SOURCE COMPRISING SAME
Timeline
Today
5.12.2013EP application
3.2.2021EP Publication
Owner
Name:
TRUMPF Lasersystems for Semiconductor Manufacturing GmbHAddress:
Johann-Maus-Strasse 2, 71254 Ditzingen, DE
Inventor
Name:
SCHULZ, JoachimAddress:
70839 Gerlingen, DE
Classification
Categories:
H01S 3/00, H01S 3/23, H01S 3/223, H05G 2/00