EP3098332
SPUTTERING TARGET
:
EP einkaleyfi: Þýðing ekki lögð inn:
20.1.2015:
16.10.2019:
15741025.9
:
19.1.2035
:
SPUTTERING TARGET
20.1.2015
16.10.2019
:
Sumitomo Chemical Company, Limited:
27-1, Shinkawa 2-chome Chuo-ku, 104-8260, Tokyo, JP
:
TAKIGAWA, Mikio:
Niihama-shiEhime, JP
:
KURODA, Toshiaki:
Niihama-shiEhime, JP
:
2014008740:
21.1.2014:
JP
:
JP2015051395:
20.1.2015
:
C23C 14/34, H01L 21/285, H01J 37/34