EP3098332
SPUTTERING TARGET
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
20.1.2015EP published:
16.10.2019EP application number:
15741025.9
EPO information:
European Patent Register
Max expiry date:
19.1.2035
Title:
SPUTTERING TARGET
Timeline
Today
20.1.2015EP application
16.10.2019EP Publication
Owner
Name:
Sumitomo Chemical Company, LimitedAddress:
27-1, Shinkawa 2-chome Chuo-ku, 104-8260, Tokyo, JP
Inventor
Name:
TAKIGAWA, MikioAddress:
Niihama-shiEhime, JP
Name:
KURODA, ToshiakiAddress:
Niihama-shiEhime, JP
Priority
Number:
2014008740Date:
21.1.2014Country:
JP
Classification
Categories:
C23C 14/34, H01L 21/285, H01J 37/34