EP3104398
CLEANING FORMULATION AND METHOD FOR REMOVING RESIDUES ON SURFACES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
3.12.2014EP published:
11.3.2020EP application number:
16178830.2
EPO information:
European Patent Register
Max expiry date:
2.12.2034
Title:
CLEANING FORMULATION AND METHOD FOR REMOVING RESIDUES ON SURFACES
Timeline
Today
3.12.2014EP application
11.3.2020EP Publication
Owner
Name:
Fujifilm Electronic Materials USA, Inc.Address:
80 Circuit Drive, North Kingstown Rhode Island 02852, US
Inventor
Name:
TAKAHASHI, TomonoriAddress:
Mesa, AZ Arizona 85206, US
Name:
DU, BingAddress:
Gilbert, AZ Arizona 85295, US
Name:
WOJTCZAK, William A.Address:
Austin, TX Texas 78737, US
Name:
DORY, ThomasAddress:
Gilbert, AZ Arizona 85233, US
Name:
KNEER, Emil A.Address:
Mesa, AZ Arizona 85212, US
Priority
Number:
201361912697 PDate:
6.12.2013Country:
US
Number:
201461936999 PDate:
7.2.2014Country:
US
Classification
Categories:
H01L 21/311, C11D 11/00