EP3104401
PURGE DEVICE AND PURGE METHOD
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
17.12.2014EP published:
3.2.2021EP application number:
14881475.9
EPO information:
European Patent Register
Max expiry date:
16.12.2034
Title:
PURGE DEVICE AND PURGE METHOD
Timeline
Today
17.12.2014EP application
3.2.2021EP Publication
Owner
Name:
Murata Machinery, Ltd.Address:
3, Minami Ochiai-cho Kisshoin Minami-ku, Kyoto-shi, Kyoto 601-8326, JP
Inventor
Name:
MURATA MasanaoAddress:
Ise-shi Mie 516-0005, JP
Name:
YAMAJI TakashiAddress:
Ise-shi Mie 516-0005, JP
Priority
Number:
2014022508Date:
7.2.2014Country:
JP
Classification
Categories:
H01L 21/673, B65D 85/86, B65G 1/00, H01L 21/67, H01L 21/677, B08B 5/04, B08B 9/08