EP3117495
LASER REPETITION RATE MULTIPLIER AND FLAT-TOP BEAM PROFILE GENERATORS USING MIRRORS AND/OR PRISMS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
18.6.2015EP published:
26.4.2023EP application number:
15809376.5
EPO information:
European Patent Register
Max expiry date:
17.6.2035
Title in English:
LASER REPETITION RATE MULTIPLIER AND FLAT-TOP BEAM PROFILE GENERATORS USING MIRRORS AND/OR PRISMSLanguage of the patent:
English
Timeline
Today
18.6.2015EP application
26.4.2023EP Publication
Owner
Name:
Kla-Tencor CorporationAddress:
One Technology Drive, Milpitas, CA 95035, US
Inventor
Name:
CHUANG, Yung-Ho AlexAddress:
Cupertino, California 95014, US
Name:
LOIU, Justin DianhuanAddress:
Santa Clara, California 95051, US
Name:
LU, XiaoxuAddress:
San Jose, California 95132, US
Name:
ARMSTRONG, J. JosephAddress:
Fremont, California 94539, US
Name:
DENG, YujunAddress:
San Jose, California 94131, US
Name:
FIELDEN, JohnAddress:
Los Altos, California 94024, US
Priority
Number:
201462015016 PDate:
20.6.2014Country:
US
Number:
201462038471 PDate:
18.8.2014Country:
US
Number:
201514596738Date:
14.1.2015Country:
US
Classification
Categories:
H01S 3/00, G03F 7/20