EP3120427
SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
19.3.2015EP published:
23.9.2020EP application number:
15765616.6
EPO information:
European Patent Register
Max expiry date:
18.3.2035
Title:
SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER
Timeline
Today
19.3.2015EP application
23.9.2020EP Publication
Owner
Name:
Kla-Tencor CorporationAddress:
Legal Department One Technology Drive, Milpitas, California 95035, US
Inventor
Name:
DENG, YujunAddress:
San Jose, California 95131, US
Name:
CHUANG, Yung-Ho AlexAddress:
Cupertino, California 95014, US
Name:
FIELDEN, JohnAddress:
Los Altos, California 94024, US
Priority
Number:
201461955792 PDate:
20.3.2014Country:
US
Number:
201414300227Date:
9.6.2014Country:
US
Classification
Categories:
H01S 3/10, G01N 21/39