EP3137847
INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TOOLS AND SEMICONDUCTOR LITHOGRAPHY SYSTEMS
:
EP einkaleyfi: Þýðing ekki lögð inn:
29.4.2015:
13.4.2022:
15721571.6
:
28.4.2035
:
INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TOOLS AND SEMICONDUCTOR LITHOGRAPHY SYSTEMS
29.4.2015
13.4.2022
:
Attocube Systems AG:
Eglfinger Weg 2, 85540 Haar, DE
:
ZECH, Martin:
D-85464 Finsing, DE
:
THURNER, Klaus:
85622 Feldkirchen, DE
:
102014006305:
30.4.2014:
DE
:
EP2015000872:
29.4.2015
:
G01B 5/00, G01D 11/24