EP3249470
STRIPPING COMPOSITIONS FOR REMOVING PHOTORESISTS FROM SEMICONDUCTOR SUBSTRATES
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
23.5.2017EP published:
3.4.2019EP application number:
17172498.2
EPO information:
European Patent Register
Max expiry date:
22.5.2037
Title:
STRIPPING COMPOSITIONS FOR REMOVING PHOTORESISTS FROM SEMICONDUCTOR SUBSTRATES
Timeline
Today
23.5.2017EP application
3.4.2019EP Publication
Owner
Name:
FUJIFILM Electronic Materials U.S.A, Inc.Address:
80 Circuit Drive, 02852, North Kingstown RI, US
Inventor
Name:
SUGISHIMA, YasuoAddress:
Gilbert, AZ, US
Name:
MIZUTANI, AtsushiAddress:
Woluwe Saint Lambert, BE
Name:
WOJTCZAK, William A.Address:
Austin, TX, US
Priority
Number:
201662340204 PDate:
23.5.2016Country:
US
Classification
Categories:
G03F 7/42, C11D 7/26, C11D 7/32, C11D 7/50, C11D 7/10