EP3268505

METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY

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    EP einkaleyfi: Þýðing ekki lögð inn
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    11.3.2016
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    4.5.2022
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    16762616.7
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    10.3.2036
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    METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY

11.3.2016
4.5.2022
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    Exogenesis Corporation
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    20 Fortune Drive, Billerica, Massachusetts 01821, US
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    KIRKPATRICK, Sean, R.
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    Billerica, Massachusetts 01821, US
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    SVRLUGA, Richard, C.
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    Billerica, Massachusetts 01821, US
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    201562131669 P
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    11.3.2015
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    US
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    US2016022058
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    11.3.2016
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    H01L 21/033, H01L 21/02, C23C 14/00