EP3268505
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
11.3.2016EP published:
4.5.2022EP application number:
16762616.7
EPO information:
European Patent Register
Max expiry date:
10.3.2036
Title in English:
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGYLanguage of the patent:
English
Timeline
Today
11.3.2016EP application
4.5.2022EP Publication
Owner
Name:
Exogenesis CorporationAddress:
20 Fortune Drive, Billerica, Massachusetts 01821, US
Inventor
Name:
KIRKPATRICK, Sean, R.Address:
Billerica, Massachusetts 01821, US
Name:
SVRLUGA, Richard, C.Address:
Billerica, Massachusetts 01821, US
Priority
Number:
201562131669 PDate:
11.3.2015Country:
US
Classification
Categories:
H01L 21/033, H01L 21/02, C23C 14/00