EP3295477
SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
4.5.2016EP published:
15.12.2021EP application number:
16793208.6
EPO information:
European Patent Register
Max expiry date:
3.5.2036
Title in English:
SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTSLanguage of the patent:
English
Timeline
Today
4.5.2016EP application
15.12.2021EP Publication
Owner
Name:
KLA - Tencor CorporationAddress:
One Technology Drive, Milpitas, California 95035, US
Inventor
Name:
SULLIVAN, JamieAddress:
Eugene, Oregon 97405, US
Name:
CHURIN, YevgeniyAddress:
San Jose, California 95132, US
Priority
Number:
201562159173 PDate:
8.5.2015Country:
US
Number:
201514982747Date:
29.12.2015Country:
US
Classification
Categories:
G01N 21/956, G01N 21/95, G01N 21/88, G02B 21/00, G02B 27/10, G02B 21/06, G02B 27/09, G02B 27/42, G02F 1/33, G02B 26/10, G02B 27/12