EP3377942
LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
30.9.2016EP published:
20.12.2023EP application number:
16787344.7
EPO information:
European Patent Register
Max expiry date:
29.9.2036
Title in English:
LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUSLanguage of the patent:
English
Timeline
Today
30.9.2016EP application
20.12.2023EP Publication
Owner
Name:
ASML Netherlands B.V.Address:
P.O. Box 324, 5500 AH Veldhoven, NL
Inventor
Name:
KANEHARA, JunichiAddress:
5500 AH Veldhoven, NL
Name:
BUTLER, HansAddress:
5500 AH Veldhoven, NL
Name:
DE WIT, Paul Corné HenriAddress:
5500 AH Veldhoven, NL
Name:
VAN DER PASCH, Engelbertus Antonius FransiscusAddress:
5500 AH Veldhoven, NL
Priority
Number:
15195532Date:
20.11.2015Country:
EP
Number:
16157155Date:
24.2.2016Country:
EP
Classification
Categories:
G03F 7/20