EP3408829
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
27.1.2017EP published:
25.10.2023EP application number:
17744929.5
EPO information:
European Patent Register
Max expiry date:
26.1.2037
Title in English:
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMSLanguage of the patent:
English
Timeline
Today
27.1.2017EP application
25.10.2023EP Publication
Owner
Name:
ASML Netherlands B.V.Address:
De Run 6501, 5504 DR Veldhoven, NL
Inventor
Name:
REN, WeimingAddress:
San Jose, CA 95133, US
Name:
LIU, XuedongAddress:
San Jose, CA 95129, US
Name:
HU, XuerangAddress:
San Jose, CA 95132, US
Name:
CHEN, ZhongweiAddress:
San Jose, CA 95129, US
Priority
Number:
201662287626 PDate:
27.1.2016Country:
US
Classification
Categories:
G01N 23/2251, H01J 37/28, H01J 37/05, H01J 37/244