EP3440511
PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION
:
EP einkaleyfi: Þýðing ekki lögð inn:
4.11.2016:
6.3.2024:
16898139.7
:
3.11.2036
:
PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION
4.11.2016
6.3.2024
:
KLA-Tencor Corporation:
One Technology Drive, Milpitas, California 95035, US
:
LEVINSKI, Vladimir:
23100 Migdal HaEmek, IL
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HAJAJ, Eitan:
61000 Tel Aviv, IL
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ITZKOVICH, Tal:
99735 Kfar Uriya, IL
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AHARON, Sharon:
1796000 Hanaton, IL
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ADEL, Michael E.:
30900 Ya'akov Zichron, IL
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PASKOVER, Yuri:
Milipitas, CA 95035, US
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NEGRI, Daria:
Milipitas, CA 95035, DE
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LUBASHEVSKY, Yuval:
Milipitas, CA 95035, DE
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MANASSEN, Amnon:
Milipitas, CA 95035, DE
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LEE, Myungjun:
Milipitas, CA 95035, DE
:
SMITH, Mark D:
Milipitas, CA 95035, DE
:
201662318086 P:
4.4.2016:
US
:
US2016060626:
4.11.2016
:
G03F 7/20, G03F 7/00, H01L 21/027, H01L 21/66