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EP3440511

PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION

  • Status:
    EP einkaleyfi: Þýðing ekki lögð inn
  • EP appl. date:
    4.11.2016
  • EP published:
    6.3.2024
  • EP application number:
    16898139.7
  • Max expiry date:
    3.11.2036
  • Title in English:
    PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION
  • Language of the patent:
    English

Timeline

Today
4.11.2016EP application
6.3.2024EP Publication

Owner

  • Name:
    KLA-Tencor Corporation
  • Address:
    One Technology Drive, Milpitas, California 95035, US

Inventor

  • Name:
    LEVINSKI, Vladimir
  • Address:
    23100 Migdal HaEmek, IL
  • Name:
    HAJAJ, Eitan
  • Address:
    61000 Tel Aviv, IL
  • Name:
    ITZKOVICH, Tal
  • Address:
    99735 Kfar Uriya, IL
  • Name:
    AHARON, Sharon
  • Address:
    1796000 Hanaton, IL
  • Name:
    ADEL, Michael E.
  • Address:
    30900 Ya'akov Zichron, IL
  • Name:
    PASKOVER, Yuri
  • Address:
    Milipitas, CA 95035, US
  • Name:
    NEGRI, Daria
  • Address:
    Milipitas, CA 95035, DE
  • Name:
    LUBASHEVSKY, Yuval
  • Address:
    Milipitas, CA 95035, DE
  • Name:
    MANASSEN, Amnon
  • Address:
    Milipitas, CA 95035, DE
  • Name:
    LEE, Myungjun
  • Address:
    Milipitas, CA 95035, DE
  • Name:
    SMITH, Mark D
  • Address:
    Milipitas, CA 95035, DE

Priority

  • Number:
    201662318086 P
  • Date:
    4.4.2016
  • Country:
    US

Classification

  • Categories:
    G03F 7/20, G03F 7/00, H01L 21/027, H01L 21/66

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