EP3440690
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS
:
EP einkaleyfi: Þýðing ekki lögð inn:
4.4.2017:
11.8.2021:
17717106.3
:
3.4.2037
:
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS
4.4.2017
11.8.2021
:
mi2-factory GmbH:
Moritz-von-Rohr-Str. 1a, 07745 Jena, DE
:
KRIPPENDORF, Florian:
07743 Jena, DE
:
CSATO, Constantin:
95236 Stammbach, DE
:
102016106119:
4.4.2016:
DE
:
EP2017058018:
4.4.2017
:
H01J 37/317