EP3440690
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
4.4.2017EP published:
11.8.2021EP application number:
17717106.3
EPO information:
European Patent Register
Max expiry date:
3.4.2037
Title:
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS
Timeline
Today
4.4.2017EP application
11.8.2021EP Publication
Owner
Name:
mi2-factory GmbHAddress:
Moritz-von-Rohr-Str. 1a, 07745 Jena, DE
Inventor
Name:
KRIPPENDORF, FlorianAddress:
07743 Jena, DE
Name:
CSATO, ConstantinAddress:
95236 Stammbach, DE
Priority
Number:
102016106119Date:
4.4.2016Country:
DE
Classification
Categories:
H01J 37/317