EP3491167
COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
26.7.2017EP published:
6.9.2023EP application number:
17835182.1
EPO information:
European Patent Register
Max expiry date:
25.7.2037
Title in English:
COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMSLanguage of the patent:
English
Timeline
Today
26.7.2017EP application
6.9.2023EP Publication
Owner
Name:
Versum Materials US, LLCAddress:
8555 S. River Parkway, Tempe, AZ 85284, US
Inventor
Name:
CHANDRA, HaripinAddress:
San Marcos CA 92078, US
Name:
LEI, XinjianAddress:
Vista CA 92081, US
Name:
MALLIKARJUNAN, AnupamaAddress:
San Marcos CA 92078, US
Name:
KIM, Moo-SungAddress:
Sungnam Gyunggi-Do 13602, KR
Priority
Number:
201662367260 PDate:
27.7.2016Country:
US
Number:
201715654426Date:
19.7.2017Country:
US
Classification
Categories:
H01L 21/02, C23C 16/34, C23C 16/36, C23C 16/455, C23C 16/40, C23C 16/30, C23C 16/56