EP3535781
SUBSTRATE LOADING SYSTEM
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
27.9.2017EP published:
5.1.2022EP application number:
17868146.6
EPO information:
European Patent Register
Max expiry date:
26.9.2037
Title in English:
SUBSTRATE LOADING SYSTEMLanguage of the patent:
English
Timeline
Today
27.9.2017EP application
5.1.2022EP Publication
Owner
Name:
Molecular Imprints, Inc.Address:
9801 Metric Boulevard Suite 100, Austin, Texas 78758, US
Inventor
Name:
PATTERSON, RoyAddress:
Plantation, FL 33322, US
Name:
AHAMED, Yaseer, A.Address:
Plantation, FL 33322, US
Priority
Number:
201662416916 PDate:
3.11.2016Country:
US
Classification
Categories:
H01L 21/68, H01L 21/687, G03F 7/20, H01L 21/67, G03F 7/00, B29C 59/02, B29C 59/00, B29C 43/02, H01L 21/677