EP3537474
PHOTORESIST STRIPPER
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
9.3.2019EP published:
2.8.2023EP application number:
19161776.0
EPO information:
European Patent Register
Max expiry date:
8.3.2039
Title in English:
PHOTORESIST STRIPPERLanguage of the patent:
English
Timeline
Today
9.3.2019EP application
2.8.2023EP Publication
Owner
Name:
Versum Materials US, LLCAddress:
8555 S. River Parkway, Tempe, AZ 85284, US
Inventor
Name:
CAO, YuanmeiAddress:
Carmel, IN 46033, US
Name:
PHENIS, Michael T.Address:
Markleville, IN 46056, US
Name:
DALTON, Richard PetersAddress:
Westfield, IN 46074, US
Priority
Number:
201916286808Date:
27.2.2019Country:
US
Classification
Categories:
H01L 21/311, G03F 7/42