EP3553811
PHOTORESIST STRIPPER
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
11.4.2019EP published:
9.3.2022EP application number:
19168714.4
EPO information:
European Patent Register
Max expiry date:
10.4.2039
Title in English:
PHOTORESIST STRIPPERLanguage of the patent:
English
Timeline
Today
11.4.2019EP application
9.3.2022EP Publication
Owner
Name:
Versum Materials US, LLCAddress:
8555 S. River Parkway, Tempe, AZ 85284, US
Inventor
Name:
Peters, Richard DaltonAddress:
Tempe, AZ 85284-2601, US
Name:
Cao, YuanmeiAddress:
Tempe, AZ 85284-2601, US
Priority
Number:
201862656843 PDate:
12.4.2018Country:
US
Number:
201916365506Date:
26.3.2019Country:
US
Classification
Categories:
H01L 21/311, G03F 7/42