EP3584827
PURGE STOCKER
Status:
EP einkaleyfi: Þýðing ekki lögð innEP appl. date:
8.12.2017EP published:
16.2.2022EP application number:
17896988.7
EPO information:
European Patent Register
Max expiry date:
7.12.2037
Title in English:
PURGE STOCKERLanguage of the patent:
English
Timeline
Today
8.12.2017EP application
16.2.2022EP Publication
Owner
Name:
Murata Machinery, Ltd.Address:
3 Minami Ochiai-cho Kisshoin Minami-ku, Kyoto-shi, Kyoto 601-8326, JP
Inventor
Name:
FUJIWARA, YoshiakiAddress:
Ise-shi Mie 516-0005, JP
Name:
SANO, KoichiAddress:
Ise-shi Mie 516-0005, JP
Name:
TOKUMOTO, MitsuyaAddress:
Inuyama-shi Aichi 484-8502, JP
Priority
Number:
2017029122Date:
20.2.2017Country:
JP
Classification
Categories:
H01L 21/673, H01L 21/677, G06Q 10/08